Coagulation in Positive Photoresist and Resist Reclamation.
نویسندگان
چکیده
منابع مشابه
Absorption and exposure in positive photoresist.
A review of the theory of absorption on microscopic and macroscopic levels is given. This theory is then applied to the absorption of UV light by diazo-type positive photoresist during exposure. A formal treatment of the properties of polychromatic light is given. Using these analyses, the effects of polychromatic exposure of a photoresist are derived. Finally, experimental verification of Beer...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 1998
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.11.153